Session Number
E02
Advisor(s)
Leonidas Ocola, Argonne National Laboratory
Location
B-206 Lecture Hall
Start Date
28-4-2016 8:00 AM
End Date
28-4-2016 8:25 AM
Abstract
Last year we studied the effectiveness of Alcohol/Water mixtures in dissolving PMMA. PMMA is a commonly used resist in electron beam lithography. Ethanol/Water mixtures in a 4:1 volume ratio developed PMMA such that they could replace mixtures of Methyl(isobutylketone) and Isopropanol. Raman spectroscopy revealed that Ethanol/Water mixtures in a 4:1 ratio and IPA/Water mixtures in a 3:1 ratio have different vibrations than those of pure Ethanol, IPA, and water. Our study this year will discuss the characteristics of Ethanol/Water and Isopropanol/Water solutions with dissolved Poly(methylmethracrylate). A fixed amount of 12,000 molecular weight PMMA was dissolved into a series of these Alcohol/Water mixtures and analyzed under a Raman spectroscope. The vibrations of PMMA molecule and alcohol and water molecule interactions can be observed through the Raman spectroscope. IPA/Water mixtures with PMMA have significant fluorescence not observed in Ethanol/Water mixtures with PMMA. Thermogravimetric analysis was used to determine if the interactions between the alcohols, water, and PMMA affected the rate at which mass was lost. Thermogravimetric analysis measures the weight of a sample as organics are decomposed with increasing temperatures.
Optimal concentrations of Ethanol and Isopropanol for the dissolution of PMMA
B-206 Lecture Hall
Last year we studied the effectiveness of Alcohol/Water mixtures in dissolving PMMA. PMMA is a commonly used resist in electron beam lithography. Ethanol/Water mixtures in a 4:1 volume ratio developed PMMA such that they could replace mixtures of Methyl(isobutylketone) and Isopropanol. Raman spectroscopy revealed that Ethanol/Water mixtures in a 4:1 ratio and IPA/Water mixtures in a 3:1 ratio have different vibrations than those of pure Ethanol, IPA, and water. Our study this year will discuss the characteristics of Ethanol/Water and Isopropanol/Water solutions with dissolved Poly(methylmethracrylate). A fixed amount of 12,000 molecular weight PMMA was dissolved into a series of these Alcohol/Water mixtures and analyzed under a Raman spectroscope. The vibrations of PMMA molecule and alcohol and water molecule interactions can be observed through the Raman spectroscope. IPA/Water mixtures with PMMA have significant fluorescence not observed in Ethanol/Water mixtures with PMMA. Thermogravimetric analysis was used to determine if the interactions between the alcohols, water, and PMMA affected the rate at which mass was lost. Thermogravimetric analysis measures the weight of a sample as organics are decomposed with increasing temperatures.